+44 (0)24 7671 8970
More publications     •     Advertise with us     •     Contact us
News Article

BAK Autoload cuts coating costs

“Autoload system” to increase wafer throughput and reach new heights in process yield.


Evatec, home of the Balzers BAK is launching a new generation “Autoload system” to increase wafer throughput and reach new heights in process yield.   With cassette to cassette handling for wafer sizes up to 8 inch,   “Autoload” completely eliminates the manual handling of wafers required traditionally for mass production evaporation systems saving time, eliminating operator errors and reducing costs. With full wafer tracking of wafer position in the coating process the user has the highest level of traceability and statistical process control   “Autoload” takes care of all necessary steps including wafer alignment, handling between cassette and coater and automatically recognizes and incorporates metrology or dummy wafers as required to complete a process batch.   Precise control of wafer handling and environment eliminate potential sources of damage or contamination and an option for integration of a coating post treatment module extends the capability of Autoload even further.   About Evatec Evatec delivers complete process solutions for thin film deposition and etch to the optical and semiconductor industries around the globe. With a technology portfolio including enhanced evaporation and sputter systems, Evatec engineers are able to offer custom systems from R&D to prototyping and mass production.   For more information contact :   Allan Jaunzens,Marketing Manager, Evatec Ltd, Lochrietstrasse 14, CH-8890,Flums, Switzerland Tel +41 81 720 1080 E mail: allan.jaunzens@evatecnet.com http:// www.evatecnet.com
Connecting the Compound Semiconductor Industry

The 13th CS International conference builds on the strengths of its predecessors, with around 40 leaders from industry and academia delivering presentations that fall within five key themes: Ultrafast Communication; Making Headway with the MicroLED; Taking the Power from Silicon, New Vectors for the VCSEL, and Ultra-wide Bandgap Devices.

Delegates attending these sessions will gain insight into device technology, find out about the current status and the roadmap for the compound semiconductor industry, and discover the latest advances in tools and processes that will drive up fab yields and throughputs.

To discover our sponsorship and exhibition opportunities, contact us at:

Email: info@csinternational.net
Phone: +44 (0)24 7671 8970

To register your place as a delegate, visit: https://csinternational.net/register

Search the news archive

To close this popup you can press escape or click the close icon.
Register - Step 1

You may choose to subscribe to the Compound Semiconductor Magazine, the Compound Semiconductor Newsletter, or both. You may also request additional information if required, before submitting your application.

Please subscribe me to:


You chose the industry type of "Other"

Please enter the industry that you work in:
Please enter the industry that you work in: