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Plasma-Therm Announces Etch System Sale To III-V Foundry

Plasma-Therm has announced the sale of a multi-module etch system to a major III-V foundry.
Plasma-Therm has announced the sale of a multi-module etch system to a major III-V foundry. To meet capacity requirements, the system is configured with three chambers for GaAs via etch process resulting in high productivity. Additionally, the VERSALINE ICP modules feature actively controlled source heating which enables a stable process environment and reduces downtime due to maintenance. These process modules incorporate fully integrated EndpointWorks for accurate and repeatable endpoint process control.

“We are pleased to continue our expansion into the high production sector and demonstrate our process performance and superior cost of ownership," said Ed Ostan, Executive Vice President of Sales & Marketing at Plasma-Therm. “The modular approach of the VERSALINE platform offers versatility that meets customer requirements from R&D through high volume production."

Plasma-Therm LLC is a U.S. based plasma process equipment supplier that serves various specialty markets including photomask, solid state lighting, thin film head and compound semiconductor. Plasma-Therm LLC has the largest installed etch equipment base in the GaAs wireless sector.
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