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Multi-tool order shipped to global LED supplier by OEM Group

The firm's Cintillio surface preparation systems will be used in the manufacture of 150mm LED wafers

Global semiconductor capital equipment manufacturer OEM Group delivered the first systems of a multi-tool order to a major LED manufacturing innovator earlier this month.

The order included surface preparation tools Spray Ozone Tool (SOT) and Spray Acid Tool (SAT), from the firm's Cintillio product line, acquired from Applied Materials-Semitool in May 2011.


 Cintillio Spray Ozone Tool        CintillioSAT Batch Spray System

"Cintillio's innovative and proprietary Enhanced Spray Technology, featuring up to six rows of nozzles, ensures high throughput and reliable wafer surface wetting with chemical mixtures," comments OEM Group Chief Technology Officer Christian Forgey.

"Cintillio breaks technological ground in 25/50-wafer batch process by offering a common platform for solvent, acid and ozone applications. And with the smallest cabinet footprint (1.78m2) among similar equipment, SAT/SOT saves fab-floor real estate while its convenient side access makes routine maintenance checks both safe and user friendly."

Back in 2009, SOT's HydroOzone post-ash clean was honoured with SEMICON West's " Sustainable Technologies Award". The tool is claimed to eliminate thousands of gallons of sulphuric acid and hydrogen peroxide and reduce deionised water consumption by 84 percent. OEM Group says it also reduces cycle time and defects and increases yield.

OEM Group's customer, an international supplier of LEDs for display, backlighting, automotive and general lighting applications, says it chose Cintillio SAT and SOT "because of the systems' flexibility to handle both resist strip as well as organic cleaning after etching," Forgey adds. The systems will support the LED manufacturer's 150mm wafer production.

"Like so many chip makers we've talked with since we acquired the Cintillio portfolio last May, our LED customer was particularly impressed by the cost-effective high throughout potential of SAT and SOT. Because of Cintillio's semi-automated batch-system capabilities, numerous wafer lots may be processed simultaneously. And that saves fabs time and money," OEM Group CEO Wayne Jeveli, says.

The Cintillio line also includes the single- and dual-chamber Spray Solvent Tool (SST) with one, two or three chemical system configurations that accommodate most solvent-based process applications.

Cintillio is the eleventh product line addition to OEM Group's LEGENDS portfolio, which was launched at SEMICON West in 2008.

"Since our debut, LEGENDS systems have steadily expanded their reputation as field-proven and game-changing for both established semiconductor markets and emerging-technology innovators," Jeveli says.

"The spray system manufacturing expertise we gained through last year's (Applied Materials/Semitool) acquisition bolstered LEGENDS' value proposition by adding cutting-edge and proven dry-in/dry-out wet chemical process technology that optimises our customers' processing times and return on investment," he concludes.

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