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SEMI-GAS delivers low vapour pressure liquefied gases for MOCVD

The firm's source system features integrated heating and control useful in LED and solar cell growth
SEMI-GAS Systems, a provider of ultra-high purity gas source and distribution systems, has introduced a new Xturion custom gas source system that safely and continuously delivers low vapour pressure liquefied process gases in vapour phase.



SEMI-GAS Systems Xturion VaporX tool

VaporX is suitable for hazardous and non-hazardous gas applications and is designed to accommodate many of the low vapour pressure gases used in semiconductor, LED and solar cell production as well as in research and development and other high purity markets.

Xturion VaporX systems are available in one and two process cylinder models, each featuring a GigaGuard PLC controller and an ergonomically positioned 8" touch screen. The unit's intuitive display schematics enable easy control over all the system's operations including gas delivery, system alarms, automatic cylinder switchover and auto-purge capabilities.

The GigaGuard controller automatically interrupts gas flow and initiates a shutdown in the event of a sensor alarm trip, while an Emergency Shutoff (EMO) button offers immediate manual operator shutdown. LED lights display the systems' status, while an audible alarm accompanies flashing lights alerting the operator should a hazardous condition occur.

Each system is CE certified and is manufactured with ultra-high purity components to guarantee long term, reliable and consistent service. The system features pneumatically operated valves, Magnehelic and pressure switch exhaust monitoring as well as an optional point-of-use mass flow controller box with heated low vapour pressure mass flow controllers.

To guard against undesirable process gas liquefaction and to help sustain the system's cylinder temperatures and flowrates, VaporX is designed with an integrated fully automatic multi-zone heat control package which includes process gas cylinder heating blankets, gas manifold heat tracing, and process gas line heat tracing. All heat zones are independently controlled and employ redundant temperature measurement with over-temperature protection.

The standard two cylinder (2CE) model is 86" tall, 33" wide and 23" deep, including the external side-mounted heater controller enclosure. Various safety features come standard, such as a UL-approved fire sprinkler, a 1/4" thick safety glass window, a self-closing, self-latching door, and a stainless steel cylinder scale. Heavy cast aluminium cylinder brackets and adjustable cylinder shelves ensure safe and secure gas cylinder fit-up.

"We are pleased to be able to continuously offer new and versatile Xturion custom gas equipment solutions," says Todd Bell, SEMI-GAS Systems' engineering director and VaporX's system designer. "Our customers work in a variety of industries with various gas requirements so we've created VaporX specifically for our customers who require delivery of low vapour pressure process gases.

He adds, "As with all our Xturion systems, VaporX is engineered to be flexible, offering many additional mechanical, electrical and enclosure features to meet each customer's exact needs. We constantly strive to provide our customers with top quality customised products they have come to trust from SEMI-GAS Systems."



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