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Rudolph reports record installations for semiconductor software

Increasing demand for productivity information has been driven by needs for better yields in LEDs and compound semiconductor manufacturing
Rudolph Technologies says it has completed record installations in Q4 2013 of its fab-wide yield management software (YMS) products, Discover Enterprise and Genesis Enterprise.

These packages are used by semiconductor manufacturers to obtain process yield and equipment productivity information.

In addition to traditional semiconductor manufacturing, Discover Enterprise Software was installed at a multi-billion dollar OEM in multiple labs, replacing the incumbent technology.

Rudolph attributes the rise in adoption to the industry’s growing need for productivity data as it seeks to increase the yields of new, increasingly complex manufacturing processes.

The data necessary to generate productivity information comes from many different sources throughout the fab: inspection and metrology systems, tool sensors, tool recipes, electrical tests, and the fab environment.

As the complexity and cost of manufacturing processes increase, the value of faster, better analysis to support critical manufacturing decisions grows too, so customers are demanding robust yield management systems that can analyse large, complex data sets quickly and effectively.

Rudolph’s fully-integrated YMS solutions are designed to analyse data from disparate sources and multiple sites to maximise productivity across the entire value chain.

“Improving quality and yield as well as tool productivity were the paramount reasons we selected Rudolph’s YMS solutions,” says Philip O’Leary, Six Sigma Master Black Belt, Murata Electronics Oy, a designer and manufacturer of silicon capacitive sensors: accelerometers, gyroscopes, combined sensors and inclinometres.

He adds, “The development of better processes and tool productivity will have direct, positive impact on our yield, and ultimately, create a better product for our customers. The ease of installation was remarkable and the product demonstrated immediate value. In addition, the scalability of the software will facilitate our future expansion plans.”

Mike Plisinski, vice president and general manager of Rudolph’s Data Analysis and Review Business Unit, comments, “The integration of our yield management system technologies, Discover Enterprise and Genesis, provides customers with a system designed for storage and alignment of a wide array of data types as well as patented analytics to transform that data into valuable information to help our customers optimise their process, improve equipment productivity, and more rapidly bring new technologies to market.”

Discover Enterprise is a real-time manufacturing monitoring and in-line yield management system that provides the foundation of a fully-integrated database and analytical routines that help semiconductor, LED, compound semiconductors, automotive, FPD, HDD and other related manufacturers improve yield, productivity and profitability in their manufacturing lines.

It integrates and analyses data from all inspection, metrology, process, and test systems in the fab and across the supply chain to provide a complete report of fab-wide yield problems, turning raw data into actionable information separating random from systematic yield loss. Process engineers use this information to optimise process tool performance (fleet management) and quickly identify and correct the causes of yield excursions.

Genesis Enterprise is an offline yield management system that provides data mining, genealogy (unit tracking) and correlation of all data types across the supply chain. The system is designed to maximise factory efficiency and automate the drill down process identifying causes of yield loss.

It can be integrated directly with the Discover Enterprise database or be used offline for yield analysis and data mining connecting to raw data files and 3rd party systems. Analysis algorithms identify domain-specific issues, such as wafer processing sequence problems, commonality of effects, product characterisation and systematic versus random yield loss.

Genesis software handles data from any source: parametric, defect, memory, design, or assembly and packaging; and integrates all-surface defect analysis, fault detection, and run-to-run process control to help users achieve maximum efficiency.
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