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Beneq C2 Wins CS High-Volume Manufacturing Award

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Automated ALD system provides high capacity solution for emerging 'More than Moore' semiconductor markets

Increasing the capacity of Atomic Layer Deposition (ALD) equipment and expanding the use of ALD from research laboratories to industrial production has long been a target of Beneq Thin Film Solutions. Lately, the company's focus has been on developing high-capacity ALD solutions for wafer processing in the semiconductor industry.

In November last year, Beneq launched Beneq C2, a cluster-compatible automated ALD system for industrial processing of wafers. It was received with great interest on the market and the company has already shipped the first equipment sets to our customers with several new orders now in line.

Now, the Beneq C2 and its deposition speed and capacity have been recognised in the Compound Semiconductor Industry Awards.

The automated wafer ALD solution in Beneq’s cluster-compatible equipment portfolio, is the winner in the High-Volume Manufacturing category of the Compound Semiconductor Industry Awards, where the industry experts have been able to vote for their favourites from a shortlist of nominees. Beneq received the award in the CS Awards ceremony in Brussels, Belgium, yesterday.

GaN HEMTs have great potential for next generation energy-efficient power switching applications, but the devices require conformal high-quality dielectrics. High-capacity thermal and plasma enhanced ALD systems can create highly conformal dielectric layers that solve many challenges in high-throughput manufacturing of GaN HEMT devices.

Beneq C2 moves throughput of wafer ALD equipment to a completely new level. It provides an optimal solution for high performance ALD on wafers in industrial applications in the emerging 'More than Moore' semiconductor markets, such as power and RF devices, RF and Piezoelectric MEMS, MEMS sensors and actuators, image Sensors, photonic integrated circuits, and OLED microdisplays.

CS Awards 2018 – Rewarding excellence, innovation and success

Sales of compound semiconductor chips are soaring. This is being driven by an uptake in solid-state lighting, rising revenues for smartphones, a build-out of capacity in optical networks, and greater use of energy-saving power electronics devices.

The CS Industry Awards have been established to showcase the success of companies within the compound semiconductor industry. The awards celebrate the leaders, the innovative engineers, and those that excel in meeting the needs of their customers in the semiconductor market.


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