Info
Info
This article was originally featured in the edition:

Atomic Layer Etching: What For?

News

Atomic layer etching promises to improve the quality of GaN-based HEMTs and eradicate the damage associated with high etching rates by Mike Cooke and Andy Goodyear Oxford Instruments Plasma Technology

All the latest market trends from the Internet of-Things to mobile technology and driverless cars have a common thread: hi tech on the move. This is propelling the industry along a well-trodden path of ever greater functionality, in a smaller and smaller space, while consuming less and less energy. Progress on all these fronts has hinged on the growth of ever thinner films and smaller device features. To do this, there is a need to create and control materials with ever increasing accuracy.

For thin-film deposition, a technology that delivers the goods is atomic layer deposition (ALD). In comparison, conventional plasma etching, which is based on a continuous "˜analogue' process, fails to offer the same degree of control. But atomic layer etching (ALE) could change all that and propel plasma etching into its "˜digital' age.








CS International 26-27 March 2019, Sheraton Airport Hotel, Brussels

In its ninth year, CS International will continue to provide timely, comprehensive coverage of every important sector within the compound semiconductor industry. Presentations are split into 5 key themes and each industry key theme will be delivered by a keynote presentation from a leading industry figure as well as a market analyst presentation tailored to the theme. Together, the talks will detail breakthroughs in device technology; offer insights into the current status and the evolution of compound semiconductor devices; and provide details of advances in tools and processes that will help to drive up fab yields and throughputs. Attendees at the two-day conference will gain an up-to-date overview of the status of the CS industry, and have opportunities to meet many other key players within this community.

Places will be limited, so register your place today: https://cs-international.net

Info
×
Search the news archive

To close this popup you can press escape or click the close icon.
×
Logo
×
Register - Step 1

You may choose to subscribe to the Compound Semiconductor Magazine, the Compound Semiconductor Newsletter, or both. You may also request additional information if required, before submitting your application.


Please subscribe me to:

 

You chose the industry type of "Other"

Please enter the industry that you work in:
Please enter the industry that you work in:
 
X
Info
X
Info