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Wafer Analysis Using Multiple Spectroscopies On One Microscope

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Horiba Scientific Webinar on May 12, 2021 14:00 PM in Eastern Time (US and Canada)

Microspectroscopy is the practice of performing various spectroscopies with sampling at the micro scale and below. Due to its ubiquity and sturdy optical design, the standard microscope from any of the major microscope manufacturers presents a natural platform for such studies and many researchers have long customized this platform for spectroscopy. Though very appealing to multiplex the native imaging functions of the microscope with spectroscopy, the effort can be very challenging because most microscopes are inherently imaging devices in the visible range of the optical spectrum and the optical design considerations that go into this function are much different from those of a broad spectrum spectroscopy instrument.

In this webinar, Horiba Scientific present a novel concept that adds various spectroscopies on any optical microscope - the so-called Standard Microscope Spectroscopy Systems or SMS. Because their design decouples the key optics required from spectroscopy from that of imaging, it enables functional optimization of spectroscopic performance without compromises to the native imaging functions of the microscope. Furthermore, by being a flexible and modular design, SMS systems enable multiplexing of different complimentary spectroscopies on one platform. This is not only affordable but also facilitates acquisition of different but complimentary spectra from the same micro-point on the sample. This functionality can be readily added to a user's existing microscope.

The large SMS wafer mapper enables combination of spectroscopies such as Raman, Photoluminescence, Time-resolved Photoluminescence and Reflectance on one instrument capable of mapping up to 300mm wafers.



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