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News Article

Temescal to Provide TRW With Advanced Semiconductor Evaporation Systems for Indium Phosphide Production

Source: Temescal

Oct. 23, 2000

FAIRFIELD, Calif. TRW s new production line for indium phosphide (InP) integrated circuits will include one of Temescal s latest innovations in electron beam evaporation systems: the FCE-2700A. According to Gregg Wallace, Temescal business manager, "These load-locked evaporators incorporate all of Temescal s latest technology improvements for e-beam lift-off metallization and wafer handling. Temescal s patented new "Lite-Touch" wafer clips were designed specifically for delicate or thin substrates. The FCE-2700A systems being installed in TRW s new fab are capable of processing 4-inch wafers at the highest throughput rates available in the industry."

The new TRW facility is the world s first high-volume InP production line. It will process state-of-the-art 4-inch InP wafers, producing chips for fiber optic transmission systems, mobile wireless communications and broadband wireless service. "We re equipping our InP production line with the most advanced semiconductor processing equipment, and Temescal s FCE-2700A evaporation system gives us the latest technology," said Dwight Streit, TRW s vice president of Advanced Semiconductors. "We expect to be producing volume quantities of InP chips beginning in the second half of 2001."

TRW (www.trw.com) is a leading supplier of high-performance integrated circuits and foundry services for commercial telecom markets, and a recognized leader in gallium arsenide and InP technologies.

Temescal is known worldwide as a leader in thin-film deposition, and provides solutions for coating challenges in semiconductor, optical and microelectronic applications. Temescal, part of BOC Coating Technology, is a member of The BOC Group, the worldwide industrial gases, vacuum technologies and distribution services company with operations in more than 50 countries and sales last year of $5.5 billion. Further information on Temescal products is available online at www.boc.com/vacuum/coating or by contacting temescal.sales@ct.boc.com.

CONTACT: Jack Prichett of TRW Tel: 310-812-5227, or jack.prichett@trw.com Lynda Sharrock-Hayes of Temescal Tel: 707-423-2608, or fax, 707-425-1706, or lynda.sharrock@ct.boc.com

 

Jack Prichett of TRW
Tel: 310-812-5227, or jack.prichett@trw.com
Lynda Sharrock-Hayes of Temescal
Tel: 707-423-2608, or fax, 707-425-1706, or lynda.sharrock@ct.boc.com
 
E-mail: lynda.sharrock@ct.boc.com
Web site: http://www.boc.com/vacuum/coating
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