Tegal Receives Order for 900 Series Etch Systems From Leading North American Telecommunications Network Provider
Source: Tegal
PETALUMA, Calif. Tegal Corporation today announced that a leading global supplier of high-performance broadband networks has placed an order for multiple Tegal 901e diode plasma etch systems. The tools will be used for nitride and gallium arsenide (GaAs) etching in the production of advanced telecommunication devices. Scheduled for installation this month, the 900 Series systems will be used to support the company s development and production of circuits for high-speed broadband networks.
``This multi-billion dollar company has been a major customer for more than six years, and has a significant installed base across several Tegal product lines, said Jim McKibben, vice president of worldwide marketing and sales for Tegal. ``We are pleased that this telecommunication industry leader continues to select Tegal equipment to increase its capacity.
The 901e systems feature a special system configuration for GaAs processing designed for the challenging wafer handling requirements of GaAs substrates. Coupled with previously purchased 6500 Series systems, the new tools will enable the company to expand its capacity with the high uptime and productivity required for these new and growing GaAs wireless applications.
"Our 900 Series system is the most flexible and robust etch system available for GaAs applications," added McKibben. "It provides our customers with leading-edge plasma etch capabilities while supporting high productivity and low operating costs."
Tegal s 900 Series systems are widely recognized for their low cost of ownership and high-throughput. More than 1,300 of the 900 Series systems have been installed worldwide and are supported by an extensive worldwide parts and service organization. The 900 Series systems deliver highly reliable, repeatable results in etching a variety of films used to manufacture semiconductor, telecommunications and optoelectronics devices, flat panel displays and thin film magnetic heads.
The system is designed around a production-proven transport system that can accommodate 75 mm to 150 mm round silicon and GaAs substrates. The transport can also be configured to accommodate rectangular substrates from 100 mm to 125 mm on a side. Typical applications include nitride etch, contact/via etch, photoresist descum, LOCOS nitride etch, zero layer etch, backside etch, isotropic oxide etch, non-critical polysilicon etch and titanium/tantalum alloy etch.
About Tegal Corporation
Tegal Corporation, headquartered in Petaluma, Calif., is a leading designer and manufacturer of plasma etch systems used in the production of integrated circuits (ICs), opto-telecom devices and other related microelectronics devices. Etching is a key process and must be repeated multiple times in the production of these devices. Tegal markets and services its systems in all major IC-producing regions of the world. Tegal was recently granted its fourth VLSI Research, Inc Ten BEST award in recognition of its superior customer support and service. More information is available on the Internet at www.tegal.com.
Safe Harbor Statement
Except for historical information, the matters discussed in this news release are forward-looking statements. Such forward-looking statements are subject to certain risks and uncertainties including, but not limited to industry conditions, economic conditions, acceptance of new technologies, the growth of the wireless market, as well as other risks set forth in the Company s periodic filings with the Securities and Exchange Commission.
Contact:
Tegal Corporation Jim McKibben, 707/763-5600 jmckibben@tegal.com or The Loomis Group, Inc. Drew Diener, 415/882-9494 drew@loomisgroup.com
Tegal Corporation
Jim McKibben, 707/763-5600
jmckibben@tegal.com
or
The Loomis Group, Inc.
Drew Diener, 415/882-9494
drew@loomisgroup.com
E-mail: drew@loomisgroup.com
Web site: http://www.tegal.com
