Tegal Receives Repeat Order for 6520 High-Density Plasma Etch System From Leading North American Telecommunications Network Provider
Source: Tegal Corporation
Petaluma, CA. Tegal Corporation (NASDAQ:TGAL) today announced that a leading global supplier of high-performance broadband networks has placed an order for a Tegal 6520 high-density plasma etch system. The tool will be used for gallium arsenide (GaAs) etching in the production of telecom devices. Scheduled for installation in June 2001, the system will be used to support the North American-based company s development and production of circuits for high-speed broadband networks.
"We are pleased to once again announce another order from this long-time, high-profile customer," said Jim McKibben, vice president of worldwide marketing and sales for Tegal. "The market for high-speed telecommunications continues to experience rapid growth and Tegal is proud to support emerging technologies, such as this, with its advanced etch systems."
The Tegal 6520 is a high-density plasma etch tool featuring patented HRe reactor technology with a dual-frequency RF power application and magnetic plasma confinement. Typical applications for the semiconductor industry include sub-micron aluminum alloy interconnect stack etch and anisotropic thick (>2 micron) aluminum alloy interconnect etch. Typical applications for the telecommunications industry include HBT/HEMT gate mesa and recess etch as well as other III-V material etch applications. With the 6520 product, Tegal also introduced its patented etch-rinse-strip-rinse (E-R-S-R) process capability. A key feature of Tegal s E-R-S-R technology is its ability to minimize the corrosive damage and eliminate the residues generally associated with etching.
Tegal s versatile model 6500 series meets the challenges for processing the ICs found in today s wireless devices. The manufacturing trend is changing as telecommunications devices will require plasma etching of high performance metals such as gold and platinum to achieve higher device density. In addition, telecommunication devices soon may incorporate embedded non-volatile memory directly on the chips, which will add to battery life and improve system performance. The 6500 series is the system of choice by those companies that are fabricating ICs and related devices with these difficult-to-etch new materials.
About Tegal Corporation
Tegal Corporation, headquartered in Petaluma, Calif., is a leading designer and manufacturer of plasma etch systems used in the production of opto-telecom devices, integrated circuits (ICs) and other related microelectronics devices. Etching is a key process and must be repeated multiple times in the production of these devices. Tegal markets and services its systems in all major IC-producing regions of the world. Tegal was recently granted its fourth VLSI Research, Inc Ten BEST award in recognition of its superior customer support and service. More information is available on the Internet at www.tegal.com.
Safe Harbor Statement
Except for historical information, the matters discussed in this news release are forward-looking statements. Such forward-looking statements are subject to certain risks and uncertainties including, but not limited to industry conditions, economic conditions, acceptance of new technologies, the growth of the wireless market, as well as other risks set forth in the Company s periodic filings with the Securities and Exchange Commission.
Contact: Tegal Corporation Jim McKibben Tel: 707/763-5600 jmckibben@tegal.com or The Loomis Group, Inc. Drew Diener Tel: 415/882-9494 drew@loomisgroup.com
Tegal Corporation
Jim McKibben
Tel: 707/763-5600
jmckibben@tegal.com
or
The Loomis Group, Inc.
Drew Diener
Tel: 415/882-9494
drew@loomisgroup.com
E-mail: drew@loomisgroup.com
Web site: http://www.tegal.com
