MOCHEM's EPI-PROOF(TM)-liquid group V precursor qualified for AIXTRON Planetary Reactor's®
Source: Aixtron
As a result of a long term R&D effort at MOCHEM and AIXTRON, high volume and purity MO-group-V-precursors such as TBA (Tertiarybutylarsin) and TBP (Tertiarybutylphosphine) have been developed. These have been qualified and are now released in EPI-PROOF™ grade for AIXTRON s reactor start up as well as for production purposes. Less toxicity, reduced waste, longer equipment uptime and beneficial low temperature growth steps have successfully been developed. Compatible hardware modules in the high-efficiency MOCVD equipment specially adapted to the use of epi tested EPI-PROOF™-quality-precursors result in competitive MOCVD technology.
HBT (Heterobipolar-Transistor) and advanced laser processes can be run on a lower cost basis together with improved device performance due to an adapted growth process. "Initial research funding of the German Ministry of Science and Technology in early 1993 and ongoing research efforts at MOCHEM, the University of Marburg and the Application Laboratory of AIXTRON were necessary to achieve a reliable chemical product from MOCHEM which is adequate for the high efficiency production scale Planetary Reactor®", stated Dr. A. Greiling, President of MOCHEM. Enhanced safety and positive environmental effects in line with improved device performance have led to the increased volume in installations of Planetary Reactors® operating with EPI-PROOF™-TBA/TBP: This world-wide increase can be particularly observed in the US and Asia.
The AIXTRON Planetary Reactor® is recognized as the most widely used multiwafer MOCVD reactor for compound semiconductor applications. The reactor concept provides laminar gas flow without turbulences for precise control of the material composition and achievement of ultra-sharp interfaces. Ultra-high uniformity along with unrivalled high growth efficiency on multiple 2, 3, 4 or 6 inch wafers is achieved through dual wafer rotation with the patented Gas Foil Rotation®.
AIXTRON offers a wide range of epitaxial systems for MOVPE, VPE and LPE from R&D-orientated systems up to large-scale Planetary Reactor® production systems for up to 25x4 inch or 9x6 inch wafers. The company has sold over 500 systems worldwide, provides an extensive service and support network for maintenance and upgrading and is represented in over 15 countries.
Among AIXTRON s list of further industrial clients are names such as Agere (formerly Lucent), Agilent/LumiLeds, Agility, Alcatel, Anritsu, Avalon, AXT, Epistar, Epitronics, EPSON, Ericsson, Honeywell, IQE, ITT, JDS-Uniphase, Kopin, Mitsubishi Electric, Motorola, MRV, Nortel, Osram, Samsung, SDL, Siemens, Showa Denko, Sumitomo Electric, Thales, UEC, VPEC and numerous other Japanese corporations. AIXTRON systems have also been installed in many of the world s most renowned research institutes including JPL, Sandia Nat. Lab., Fraunhofer Institute, ITRI-OES and CNRS. AIXTRON is very active in advancing MOCVD technology through collaborations and joint R&D projects with major partners worldwide.
EPI-PROOF™ is a worldwide trademark of MOCHEM/Germany.
Contact: Octavia Schirmer Tel: +49-241-8909-474 Fax: +49-241-8909-149 Email: ocs@aixtron.com
Octavia Schirmer
Tel: +49-241-8909-474
Fax: +49-241-8909-149
Email: ocs@aixtron.com
E-mail: ocs@aixtron.com
