AIX 2400G3 multi wafer system with EpiRAS ordered by Laser R and D group at Mitsubishi Electric Corp
Source: Aixtron
AIXTRON AG has received a repeat order for an AIX 2400G3 MOCVD Planetary Reactor® from Mitsubishi Electric Corporation, Itami, Japan. The purchase of this AIX 2400G3 MOCVD production system, with an EpiRAS advanced in-situ characterization module included, will enable the Mitsubishi R&D group to develop new device structures for highest quality lasers with a fast transfer to the production department.
Dr. Yutaka Mihashi, chief engineer and leader of the epitaxy R&D group of Mitsubishi, stated: "With the AIXTRON Planetary Reactor system our R&D group can fully concentrate on the investigation of new materials and the development of new products with ever growing complexity and necessity of stricter process control. We are in the fortunate situation to purchase a multi wafer system which will help us to further reduce the lead time from R&D level to mass production. The deciding factors have been good results achieved on our initial AIXTRON systems as well as the possibility to use most advanced in-situ measurement equipment like the EpiRAS. This strategy will guarantee a higher degree of process control in production combined with cost minimization".
The AIXTRON group offers a wide range of epitaxial systems for MOVPE, VPE and LPE from R&D-oriented systems up to large-scale Planetary Reactor® production systems for up to 25x4" or 9x6" wafers. AIXTRON has sold over 500 systems worldwide. The company provides an extensive service and support network for maintenance as well as upgrading systems and is represented in over 15 countries.
AIXTRON is the leading supplier of MOCVD equipment for long wavelength laser production at Agere (formerly Lucent), Agilent, UK, Alcatel, Anritsu, IQE, JDS-Uniphase, Samsung, Sumitomo Electric, Thales. For other material groups Agilent/LumiLeds (subsidiary of Hewlett-Packard), AXT, Epistar, Epitronics, Epson, Honeywell, ITT, Kopin, Motorola, Nortel, Osram, Showa Denko, UEC, VPEC and numerous Japanese corporations are further references. AIXTRON systems have also been installed in the most renowned research institutes worlwide including JPL, Sandia Nat. Lab., Fraunhofer Institute, ITRI-OES, CNRS. AIXTRON is very active in advancing MOCVD technology through collaborations and joint R&D projects with major partners worldwide.
Contact: Octavia Schirmer Tel: +49-241-8909-474 Fax: +49-241-8909-149 E-mail: ocs@aixtron.com
Octavia Schirmer
Tel: +49-241-8909-474
Fax: +49-241-8909-149
E-mail: ocs@aixtron.com
E-mail: ocs@aixtron.com
