Virginia Tech Signed Contract And Research Cooperation Agreement For An AIXTRON 200/4 RF-S GaN System
Source: Aixtron AG
July 2, 2001
Aachen, Germany. Virginia Tech and AIXTRON are pleased to announce that Virginia Tech purchased a new AIXTRON Gallium Nitride MOCVD system. Virginia Tech had decided to purchase the AIXTRON 200/4 RF-S reactor due to the unsurpassed quality and versatility of the Nitrides deposited in this reactor. Based on the extremely successful AIX 200/4 reactor series, this stainless steel version offers a high flexibility in the choice of in-situ measurement methods. Various optical ports allow the usage of Reflectance Spectroscopy with the Filmetrics Reflectance Monitor, RAS, Pyrometry, and many other methods. On the other hand the robust design of the MOCVD System ensures reproducible and reliable operation.
As Professor Louis Guido, head of the GaN team within the departments of Materials Science and Engineering and Electrical and Computer Engineering states: "The group will focus on the growth mechanisms of Group III Nitride alloys and heterostructures and on the application of these materials in optoelectronic devices. For this purpose the AIX 200/4RF-S is the ideal MOCVD system which ensures high reliability and flexibility, a prerequisite for the growth of a variety of different materials. The consequent design of the reactor for all kinds of in-situ monitoring will allow us to combine the growth of highest quality nitride based structures with sophisticated optical investigations inside the reactor."
AIXTRON offers a wide range of epitaxial systems for MOVPE, VPE and LPE from R&D-oriented systems up to large-scale Planetary Reactor® production systems for up to 25x4" or 9x6" wafers. AIXTRON has sold over 500 systems worldwide and is represented in over 15 countries. The company provides an extensive service and support network for maintenance as well as upgrading of its systems.
AIXTRON is a supplier to leading industrial clients such as Agere (formerly Lucent), Agilent/LumiLeds, Alcatel, Anritsu, AXT, Epistar, Epitronics, EPSON, Honeywell, IQE, ITT, JDS-Uniphase, Kopin, Mitsubishi Electric, Motorola, Nortel, Osram, Samsung, Siemens, Showa Denko, Sumitomo Electric, Thales, UEC, VPEC and numerous Japanese corporations. AIXTRON systems have also been installed in many of the world s most renowned research institutes including JPL, Sandia Nat. Lab., Fraunhofer Institute, ITRI-OES, CNRS. AIXTRON is very active in advancing MOCVD technology through collaborations and joint R&D projects with major partners worldwide. PR text here
Contact: Octavia Schirmer Tel: +49 241 8909 474 Fax: +49 241 8909 149 E-mail: ocs@aixtron.com
Octavia Schirmer
Tel: +49 241 8909 474
Fax: +49 241 8909 149
E-mail: ocs@aixtron.com
E-mail: ocs@aixtron.com
