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New products: IEM, EV Group, Allied High Tech and Scientific Systems

MOCVD reactor trap cleaning in-house

With the introduction of IEM Technologies new Centurion Reactor Trap Cleaning Station, the difficult and potentially hazardous task of cleaning MOCVD reactor traps can now be carried out on-site, offering increased safety, faster throughput, low waste production and reduced costs. The Centurion comprises a specially designed, purpose built oxidation and cleaning station integrated into a fume cabinet. This is connected to a scrubbing system that removes and contains any toxic and hazardous substances generated in the cleaning process. The design prevents discharge to drain of any toxic effluent, and the purpose built scrubber prevents any harmful emissions to atmosphere.

IEM Technologies Ltd of Bridgwater, UK provides full training on safe procedures for the cleaning of reactor traps, drawing upon the extensive experience and knowledge built up by IEM engineers since the company first offered trap cleaning services to UK customers over a decade ago. Currently the Centurion is available in the USA and Far East, IEM plans to extend distribution to other world markets in the near future.

Contact: Peter Vernon
Tel. +44 1278 420555
Fax. +44 1278 420666
Email: IEMuk1@aol.com
Web: www.iemtec.com

EV Group displays HERCULES lithography track system

EV Group (EVG) an Austrian manufacturer of MEMS and semiconductor wafer processing equipment, will display its HERCULES lithography track system at SEMICON Europa 2002. This highly-automated system is designed to perform photoresist coating, photolithography and developing of wafers up to 300 mm in size in one integrated tool. The HERCULES has specialized features for the production of micro-electro-mechanical-systems (MEMS) and compound semiconductor devices as well as for wafer level packaging applications and has been field qualified through its use at worldwide production installations.

The advantages of the HERCULES include single system management of multiple processes, lower cost of ownership due to increased production output, greater speed, and a smaller footprint. Easy accessibility of all process modules reduces maintenance time and increases productivity. This fully-automated and customizable system is designed for the manufacturing of highly integrated components, such as MEMS, GaAs or other III-V devices like light emitting diodes (LEDs) or laser diodes (LDs). The wafers are handled by a robotic autoload cassette-to-cassette system between spin coat, bake, chill, align/expose and develop stations. Non-standard sizes like 3"-6" GaAs, 2"-3" InP wafers, or ultra-thin compound semiconductor wafers mounted on carriers can be safely handled through all the stations by use of the special robot end-effector. Converting the equipment to accommodate different size wafers is easy and fast, again increasing system uptime. All HERCULES stations are programmable through one central operator interface, which greatly facilitates process control. The system is flexible and can also work in a single process mode if needed.

Contact: Rose Gismondi
EV Group, Cranston, RI
Tel. +1 401 784-0008
Fax: +1 401 784-9933
E-mail: Sales@EVGroup.com

Low-speed saw from Allied High Tech Products

Allied High Tech Products, Inc. of Rancho Dominguez, CA, has announced the release of its latest generation precision low-speed saw. The TechCut 4 combines clean, intuitive design and rugged, durable components to offer excellent long-term value in this equipment segment. It incorporates a gravity-feed design featuring 1-micron cross-indexing resolution, 3 to 6-inch blade range, a spacious work platform, touch-pad variable speed control from 10-500 rpm, Rotation Cutting Attachment integration with machine controls, retractable dressing stick attachment, ergonomic splash shield, and corrosion-resistant machined aluminum and stainless steel construction. Allied High Tech Products, Inc. is a leading manufacturer and global distributor of superior quality equipment and consumables for precision surface and sample preparation.

Contact: Kim Dermit
Tel. +1 800 675-1118 US/Canada
Tel. +1 310 635-2466 worldwide
Email: kwdermit@alliedhightech.com
Web: www.alliedhightech.com


SmartProbe speeds process, plasma characterization for plasma researchers

Plasma physics researchers will now be able to measure and analyze their plasmas more quickly and efficiently thanks to Scientific Systems of Dublin, Ireland. The company s newest version of the SmartProbe, an advanced Langmuir probe, now comes with an RS232 communication connection that allows the system to work via a laptop. In addition, the speed at which the SmartProbe is triggered when measuring pulsed plasmas has increased to more than 100 kilohertz up from the previous version s 18 kilohertz.

The SmartProbe measures plasma density, uniformity, and electron temperature distribution. The probe allows plasma researchers to completely understand the complexity and characteristics of a plasma and how it relates to the plasma process they are trying to develop, explains.

"Understanding the plasma is key to researchers," says Roisin Cheshire, international sales manager for Scientific Systems, "whether they etching a semiconductor chip, depositing a thin film, or modifying material surfaces. The portability, increased compatibility, and increased ability to measure pulsed plasmas will give them detailed understanding of the plasma and its interaction with the surface material."

Contact: (Ms) Roisin Cheshire
Tel. +353 1-816-7526
Email: rcheshire@scisys.com
Web: www.scisys.com



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