Technical Insight
Aixtron qualifies Mochem's precursors (Materials and Equipment)Untitled Document
Mochem (Marburg, Germany) has received qualification of its range of TBA (tertiary butyl arsine) and TBP (tertiary butyl phosphine) precursors using Aixtron s production MOCVD reactors. Mochem says its high-purity Epiproof group V liquid metallorganics have reduced toxicity and lead to fewer waste products, longer equipment uptime and a capability for low temperature epitaxial growth steps. The company began developing TBA and TBP precursors in 1993 with research funding from the German Ministry of Science and Technology and ongoing research efforts with the University of Marburg and Aixtron.
