Technical Insight

Equipment orders in brief (Materials and Equipment)

Sunday 1st April 2001

MBE Technology Pte has placed an order for two Riber reactors: one MBE6000 (4 6 inch) and one MBE7000 (7 6 inch). Three multiwafer systems are already in production at MBE Technology s facility in the Singapore Science Park. To date, seven of Riber s new 7 6 inch systems have been ordered by major foundries worldwide.

Tegal has received a repeat order from a leading North American supplier of high-performance broadband networks for a 6520 high-density plasma etch system. Scheduled for installation in June 2001, the system will be used for HBT/HEMT gate mesa and recess etch as well as other compound semiconductor device etching processes.

KDF has received an order for three in-line sputtering tools from a major supplier of components to the fiber-optic communications industry.

Munich-based Karl Suss has received multiple orders for its recently introduced M6000L metal lift-off cluster system (see Product Showcase) from a North American GaAs wafer fab.

Ultratech Stepper has received an order from Branchy Technology of Taiwan for a photolithography tool that will be used to manufacture GaAs components, in particular SAW filters.

Equipment orders in brief (Materials and Equipment)

More news articles

Navigation

Our magazines

Our conferences

Our awards

About us

Data Protection Preferences

You chose the industry type of "Other"