Technical Insight
Opto Tech goes for Tegal etch systems (Materials and equipment)
Tegal has received orders for 901e and 903e plasma etch systems from Opto Tech, a manufacturer of MOSFETs, LEDs and other optoelectronic devices. The 901e system will be used to etch polysilicon devices, and the 903e used for oxide etching in silicon and compound semiconductors. The etchers are scheduled for installation in May at Opto Tech s fab in Taiwan.