News Article
Trikon Releases New Plasma Etch Products (Product Showcase)
Trikon Technologies has introduced two new plasma etch products for compound semiconductor and silicon applications. The Omega fxP is a multi-chambered cluster tool that combines its Omega plasma etch sources with a Brooks MX 800 wafer handler. The Omega system offers up to six process modules, wafer alignment and cool-down with two vacuum cassette stations. A single chamber format is available that uses an enhanced version of Trikon s Omega 201, featuring the company s plasma source and M0RI plasma-enhanced RIE and ICP system. Both the Omega fxP cluster tool and the single-chamber Omega 201 feature Windows NT control software, advanced electrostatic chucks and low footprint, in addition to dynamic notch/flat alignment and wafer cool-down. Contact Dave Thomas, Trikon Technologies, Ringland Way, Newport, NP18 2TA, UK Tel. +44 (0)1633 414027 E-mail dave.thomas@trikon.com
CS International to return to Brussels – bigger and better than ever!
The leading global compound semiconductor conference and exhibition will once again bring together key players from across the value chain for two-days of strategic technical sessions, dynamic talks and unrivalled networking opportunities.
Join us face-to-face between 28th – 29th June 2022
- View the agenda.
- 3 for the price of 1. Register your place and gain complementary access to TWO FURTHER industry leading conferences: PIC International and SSI International.
- Email info@csinternational.net or call +44 (0)24 7671 8970 for more details.
*90% of exhibition space has gone - book your booth before it’s too late!
