+44 (0)24 7671 8970
More publications     •     Advertise with us     •     Contact us
 
Technical Insight

Trikon releases new plasma etch products (Product Showcase)

Trikon Technologies has introduced two new plasma etch products for compound semiconductor and silicon applications. The Omega fxP is a multi-chambered cluster tool that combines its Omega plasma etch sources with a Brooks MX 800 wafer handler. The Omega system offers up to six process modules, wafer alignment and cool-down with two vacuum cassette stations. A single chamber format is available that uses an enhanced version of Trikon s Omega 201, featuring the company s plasma source and M0RI plasma-enhanced RIE and ICP system. Both the Omega fxP cluster tool and the single-chamber Omega 201 feature Windows NT control software, advanced electrostatic chucks and low footprint, in addition to dynamic notch/flat alignment and wafer cool-down. Contact Dave Thomas, Trikon Technologies, Ringland Way, Newport, NP18 2TA, UK Tel. +44 (0)1633 414027 E-mail dave.thomas@trikon.com
×
Search the news archive

To close this popup you can press escape or click the close icon.
×
Logo
×
Register - Step 1

You may choose to subscribe to the Compound Semiconductor Magazine, the Compound Semiconductor Newsletter, or both. You may also request additional information if required, before submitting your application.


Please subscribe me to:

 

You chose the industry type of "Other"

Please enter the industry that you work in:
Please enter the industry that you work in: