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Trikon Releases New Plasma Etch Products (Product Showcase)

Trikon Technologies has introduced two new plasma etch products for compound semiconductor and silicon applications. The Omega fxP is a multi-chambered cluster tool that combines its Omega plasma etch sources with a Brooks MX 800 wafer handler. The Omega system offers up to six process modules, wafer alignment and cool-down with two vacuum cassette stations. A single chamber format is available that uses an enhanced version of Trikon s Omega 201, featuring the company s plasma source and M0RI plasma-enhanced RIE and ICP system. Both the Omega fxP cluster tool and the single-chamber Omega 201 feature Windows NT control software, advanced electrostatic chucks and low footprint, in addition to dynamic notch/flat alignment and wafer cool-down. Contact Dave Thomas, Trikon Technologies, Ringland Way, Newport, NP18 2TA, UK Tel. +44 (0)1633 414027 E-mail
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