Technical Insight
MKS consolidates process control lines (Materials and Equipment)
MKS Instruments (Andover, MA), a supplier of products for measuring, controlling and analysing gases, as well as products for reactive gas generators and power delivery, has formed the Advanced Process Control group (APC). The group will combine the company s Spectra and On-Line product lines to provide equipment for monitoring and controlling manufacturing processes in semiconductor and optoelectronic applications. On-Line s portfolio includes FTIR spectroscopy systems for gas and wafer metrology, while Spectra specializes in process monitors and gas analysers. "The advanced sensor and software technologies of Spectra and On-Line give us complementary solutions in both gas analysis and film metrology," said John Bertucci, chairman and CEO of MKS. "By strengthening our position in process monitoring and control with these diagnostic tools, we are able to develop new products to serve growing requirements in diagnostics and advanced process control."
