GaAs-based Devices: How To Choose A Suitable Substrate
The material is usually classified according to the crystal growth technology used in its manufacture. For the user, it is more meaningful to designate materials by their properties rather than by the production technology used. The two available substrate types are often called "low EPD" and "high EPD" material. The etch pit density (EPD) measures the dislocation density of the substrate. For semi-insulating GaAs, typical EPDs for material specified as high or low EPD are
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