News Article

Plasma-Therm Announces Etch System Sale To III-V Foundry

Plasma-Therm has announced the sale of a multi-module etch system to a major III-V foundry.
Plasma-Therm has announced the sale of a multi-module etch system to a major III-V foundry. To meet capacity requirements, the system is configured with three chambers for GaAs via etch process resulting in high productivity. Additionally, the VERSALINE ICP modules feature actively controlled source heating which enables a stable process environment and reduces downtime due to maintenance. These process modules incorporate fully integrated EndpointWorks for accurate and repeatable endpoint process control.

“We are pleased to continue our expansion into the high production sector and demonstrate our process performance and superior cost of ownership," said Ed Ostan, Executive Vice President of Sales & Marketing at Plasma-Therm. “The modular approach of the VERSALINE platform offers versatility that meets customer requirements from R&D through high volume production."

Plasma-Therm LLC is a U.S. based plasma process equipment supplier that serves various specialty markets including photomask, solid state lighting, thin film head and compound semiconductor. Plasma-Therm LLC has the largest installed etch equipment base in the GaAs wireless sector.
CS International to return to Brussels – bigger and better than ever!

The leading global compound semiconductor conference and exhibition will once again bring together key players from across the value chain for two-days of strategic technical sessions, dynamic talks and unrivalled networking opportunities.

Join us face-to-face between 28th – 29th June 2022

  • View the agenda.
  • 3 for the price of 1. Register your place and gain complementary access to TWO FURTHER industry leading conferences: PIC International and SSI International.
  • Email  or call +44 (0)24 7671 8970 for more details.

*90% of exhibition space has gone - book your booth before it’s too late!


Search the news archive

To close this popup you can press escape or click the close icon.
Register - Step 1

You may choose to subscribe to the Compound Semiconductor Magazine, the Compound Semiconductor Newsletter, or both. You may also request additional information if required, before submitting your application.

Please subscribe me to:


You chose the industry type of "Other"

Please enter the industry that you work in:
Please enter the industry that you work in:
Live Event