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New shares from AIXTRON stock option program will be traded under separate ISIN

AIXTRON AG worldwide leading provider of deposition equipment to the semiconductor industry, has a number of stock option programs in place that grant the members of the Executive Board and employees the right to purchase AIXTRON shares under certain conditions

Under the terms of the stock option plan 2007, stock options can currently be exercised. New
shares resulting from exercised options are not entitled for dividend for fiscal year 2009 and
will therefore be traded on the Frankfurt Stock Exchange under the separate ISIN
DE000A1DAHX7 until and including the day of the AGM 2010 on May 18, 2010.

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