News Article
SMI Announces Sale of NanoH+ CVD System for Oxides and Nitrides
Structured Materials Industries, Inc. announced today, March 26th, 2010, the sale of a NanoH+ CV tool for deposition of oxides and nitrides.
The tool, capable of depositing films on 100 mm substrates is specifically designed to alternate between depositions of both oxides and nitride films with minimal cross contamination. The load locked tool features operation through 1200C. This system offers rapid turnaround from sample to sample and material to material. Dr. Gary S. Tompa, company president said "SMI has had a surge of NanoH and NanoH+ CVD™ tool sales as we have focused on providing customized solutions for researcher flexibility, upgradeability, value pricing, experimental results, customer achievements, and other benefits." SMI’s line of NanoH CVD™ span several sizes, multiple material systems, plasma enhancement options, and so on; including the option to operate in both CVD and ALD modes.