News Article

SemiSouth Orders Largest Commercial SiC Reactor Tool From Aixtron

Aixtron says SemiSouth has ordered the world’s largest commercial capacity planetary reactor for the production of SiC power devices.

Aixtron SE has a new order for a CVD reactor from existing customer SemiSouth Laboratories of Starkville, MS, USA.

The order is for an AIX 2800G4 WW deposition system in the 10x100 mm and the 6x150 mm configuration which will be used for the production of power silicon carbide (SiC) Junction Field Effect Transistor (JFET) and Schottky Barrier Diode microelectronic devices.

SemiSouth placed the order in the fourth quarter of 2010 and the system will be delivered in the second quarter of 2011. The local Aixtron support team will commission the new reactor at the company’s state of the art clean-room facility housed in its Starkville, MS, USA headquarters.

“Aixtron technology is what we are familiar with after nearly seven years experience with Aixtron SiC reactors," says Jeffrey B. Casady, CTO and VP Business Development SemiSouth Laboratories. “We now have an urgent need to move up to larger wafer diameters and increase our capacity for power device production."

“Therefore, it was an easy selection process for us because this machine provides the world’s largest commercial CVD reactor capacity. Moreover, we will achieve optimum time to market because theAIX 2800G4 WW system is the production-qualified SiC Planetary Reactor platform. We are assured of the best epitaxial layer quality with excellent homogeneity and the lowest epitaxial defect density giving us maximized device yield," he concluded.
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