News Article

New Suite Of GaN LED MOCVD Tools Revealed By Veeco

The three new reactors, suited to the growth of gallium nitride based LEDs, come in 2, 4, 6 and 8” wafer configurations


Veeco Instruments has introduced three new models of its TurboDisc MOCVD systems for the production of high brightness LEDs.

These are the TurboDisc MaxBright M, TurboDisc MaxBright MHP and TurboDisc K465i HP.



MaxBright MHP reactor

The MaxBright M is a modular and more compact version of Veeco’s multi-reactor system. It is claimed to provide easier serviceability and up to 15% improved footprint efficiency compared to Veeco's MaxBright tool. It also features improved layout configuration flexibility to accommodate various fab spacing requirements.

The MaxBright MHP, is a high performance version of the new modular “." described above. Veeco says this model provides as much as 20% within-wafer wavelength uniformity improvement over the MaxBright. Higher yields are achieved from technology advancements that result in improved thermal and flow capability. The MaxBright MHP also provides lower cost of ownership as compared to MaxBright.

The final reactor is the K465i HP, which a high performance option for Veeco’s single-reactor MOCVD system . It apparently delivers up to 20% within-wafer wavelength uniformity improvement compared to the K465i and a lower cost of ownership.

These new systems are available in 2, 4, 6 and 8" configurations.

Veeco says existing MaxBright and K465i systems are easily field-upgradeable to the high performance HP option. All of Veeco’s MOCVD systems feature its TurboDisc technology, which enable very good throughput.

William J. Miller, Ph.D., Executive Vice President, Veeco Process Equipment, comments, "This new suite of products provides our customers with tremendous flexibility to make the most of their capital investments and choose the system that works best in their unique production environment. The innovation in the MaxBright M, MaxBright MHP and K465i HP was accomplished by listening to our customers and focusing on system improvements that could drive their productivity and yield – two critical factors in our customers’ success."

John R. Peeler, Chairman and Chief Executive Officer of Veeco adds, “This new product line-up, all based on our industry leading technology and automation expertise, can help to accelerate worldwide adoption of LED lighting by reducing manufacturing costs. Veeco remains committed to providing the industry’s highest capacity, highest throughput and lowest cost of ownership MOCVD systems available."

According to IMS Research, the K465i, introduced in 2010, was the top selling MOCVD tool that year, and the MaxBright, launched in 2011, was the top seller last year.

Earlier this year, Compound Semiconductor Magazine awarded Veeco the “Compound Semiconductor Manufacturing Award, stating “MaxBright was the biggest breakthrough in compound semiconductor manufacturing over the last 12 months."

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