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Taiwan’s NCH University Selects Aixtron Reactor For GaN-on-Si Research

The MOCVD system will be used to investigate the heteroepitaxial growth of gallium nitride based alloys on silicon wafers, mainly for LED research


Aixtron SE has announced that National Chung Hsing University (NCHU), a new customer and technical university in Taiwan, has placed an order for one Close Coupled Showerhead (CCS) MOCVD system in a 3x2-inch wafer configuration.

NCHU will use the CCS system to research GaN-on-Silicon. One of Aixtron´s local service support teams has already installed and commissioned the new reactor in a dedicated cleanroom facility at NCHU’s site in Taichung, Taiwan.

Wuu, a professor at the Department of Materials Science and Engineering at NCHU, comments, “Aixtron’s Close Coupled Showerhead system is the ideal choice for the study of GaN-on-Silicon. This is not only my opinion from my years of familiarity with the technical challenges of these materials, but also the consensus of many leading researchers around the world who are using the Aixtron MOCVD system."

Horng, another professor at NHCU, based at the Graduate Institute of Precision, adds, “The reactor has demonstrated its versatility, ease of operation and reproducibility over the range of parameters of interest to us, we therefore will be able to produce high-quality GaN-on-Si epilayers and other novel structures."

Since 2001, the research team led by Wuu and Horng at NCHU has developed many unique LED technologies for both GaN and AlGaInP materials. Today, their integrated laboratory from epitaxial growth to device processing and packaging has established itself as one of the leading research centre in Taiwan. Many of its successful academic-industry cooperation projects have also been awarded by the National Science Council of Taiwan.

NCHU claims to be the only state-run university in central Taiwan that offers a comprehensive choice of both research and taught curriculum programmes. The institute has been investing in three centres of research excellence including biotechnologies, nano-biomimetics and advanced industrial precision instrumentation technologies, as it strives to become a world-class university over the next five years.



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