Laytec Provides Precise Heating Zone Calibration
With EpiTriple TT and AbsoluT, temperature calibration of all three heating zones of an MOCVD showerhead reactor can be achieved
The precision of temperature measurements is crucial for a proper in-situ
monitoring of epitaxial growth.
It is even more important if you measure temperature at different points on the same wafer, on different wafers or in different reactors simultaneously or if you compare the temperature of different runs.
Tony SpringThorpe of the National Research Council of Canada reported recently about fast and easy temperature calibration of all three heating zones of his showerhead reactor.
SpringThorpe uses LayTec’s AbsoluT for calibration of EpiTriple TT that monitors the growth of arsenide and phosphide based devices by three measurement heads at three different viewports.
AbsoluT sets up one exact reference point for pyrometry measurements at three viewports, where temperature variations are often caused by adjustment, window coating or manufacturing tolerances of the equipment.AbsoluT attached to a showerhead reactor lid for calibration
SpringThorpe says, “AbsoluT is a quantum leap compared to the former calibration methods. It takes only five minutes to calibrate all three heads and requires no further calculation. Hence, I can take under real-time control all three heating zones. This helps enormously to grow uniform buffer and MQW structures. I am convinced that every MOCVD system should be equipped with AbsoluT."
AngelTech Live III: Join us on 12 April 2021!
AngelTech Live III will be broadcast on 12 April 2021, 10am BST, rebroadcast on 14 April (10am CTT) and 16 April (10am PST)
and will feature online
versions of the market-leading physical events: CS International
and PIC International
PLUS a brand new Silicon Semiconductor International
Thanks to the great diversity of the semiconductor industry, we are always chasing new markets and developing a range of exciting technologies.
2021 is no different. Over the last few months interest in deep-UV LEDs has rocketed, due to its capability to disinfect and sanitise areas and combat Covid-19. We shall consider a roadmap for this device, along with technologies for boosting its output.
We shall also look at microLEDs, a display with many wonderful attributes, identifying processes for handling the mass transfer of tiny emitters that hold the key to commercialisation of this technology.
We shall also discuss electrification of transportation, underpinned by wide bandgap power electronics and supported by blue lasers that are ideal for processing copper.
Additional areas we will cover include the development of GaN ICs, to improve the reach of power electronics; the great strides that have been made with gallium oxide; and a look at new materials, such as cubic GaN and AlScN.
Having attracted 1500 delegates over the last 2 online summits, the 3rd event promises to be even bigger and better – with 3 interactive sessions over 1 day and will once again prove to be a key event across the semiconductor and photonic integrated circuits calendar.
So make sure you sign up today and discover the latest cutting edge developments across the compound semiconductor and integrated photonics value chain.
REGISTER FOR FREE