News Article
Momentive extends manufacturing capacity of TaC
The expansion will help to enable next generation SiC epi tools and provide improved dimensional control for current GaN tools
Momentive Performance Materials Quartz Inc. (MPM) has increased and expanded its manufacturing capacity of tantalum carbide coatings (TaC) in response to the larger demand for SiC power devices and increased need for improved dimensional control for GaN LEDs.
With the expansion, MPM has the capability to produce up to 750 mm diameter parts, versus the 500 mm previous limitation. The diameter increase can help enable next generation SiC epi tools and can provide improved dimensional control for the current GaN tools now using alternate protective coatings.
MPM's TaC is manufactured using a proprietary coating process, which yields excellent resistance to hot hydrogen during epitaxial processes. SiC coatings can start to decompose at 1200 to 1400oC, whereas TaC generally is stable to over 2000oC.
Additionally, the coatings can provide exceptional dimensional control and, therefore, a uniform and conformal coating, even on wafer pockets and complex shapes. TaC coatings are used in MOCVD tools for the production of GaN and SiC devices.
