+44 (0)24 7671 8970
More publications     •     Advertise with us     •     Contact us
 
News Article

LayTec's 21st in-situ seminar at ICMOVPE XVIII

News
Established event covers latest metrology developments

More than 80 researchers and engineers took part at Lay-Tec's in-situ seminar last week. They discussed the latest research results and learned about new in-situ metrology developments.

Dan Koleske of Sandia National Labs (USA) presented in-situ results of AlN/sapphire growth measured by EpiCurveTT at his Taiyo Nippon Sanso SR4000 reactor[1]. The talk of Gary Tompa of Structured Materials Industries (SMI, USA) focused on integration and utiliziation of EpiTT in SMI's Ga2O3 MOCVD system [1]. Hilde Hardtdegen (Research Center Juelich, Germany) reported on finding 2D materials by combining reflectance and temperature sensing of EpiR TT at her AIX 200 reactor [1]. Finally, Oliver Schulz of LayTec gave an overview on latest modular adaptations of LayTec's new Gen3 product lines to AIX Crius, AIX 6x2" and Veeco K700 reactors  

[1] For a PDF copy of these talks please contact info@laytec.de.

×
Search the news archive

To close this popup you can press escape or click the close icon.
×
  • 1st January 1970
  • 1st January 1970
  • 1st January 1970
  • 1st January 1970
  • View all news 22645 more articles
Logo
×
Register - Step 1

You may choose to subscribe to the Compound Semiconductor Magazine, the Compound Semiconductor Newsletter, or both. You may also request additional information if required, before submitting your application.


Please subscribe me to:

 

You chose the industry type of "Other"

Please enter the industry that you work in:
Please enter the industry that you work in: