Pfeiffer to exhibit at Semicon Europa
Vacuum+Fab Solutions will be showing its vacuum technology and gas abatement systems at Semicon Europa, from November 18 to 21, 2025 in Munich, Germany.
Vacuum pumps on display will include the UltiDry multi-stage vacuum pump, which combines robustness with low energy requirements. The UltiDry has been designed to handle high flow rates, harsh operating conditions, and corrosive gases.
Gas abatement systems from Pfeiffer focus on reducing harmful emissions and improving air quality within fab environments. Pictured above is the CT-BW Burn-Wet system which provides cleaning efficiency for process gases/ for greenhouse gases (PFCs), and reliable disposal of gaseous and particulate by-products.
The company's stand will also include an interactive 3D-printed model showing where each of the different technologies from Pfeiffer are integrated into semiconductor fab from cleanroom to exhaust.
