VIDEO
MEI Wet Processing - Full Auto Wet Bench
Description

The MEI Evolution series semiconductor and MEMs wet benches are in-line, configurable, automated, modular, linear batch immersion wet process systems made for high throughput at a low cost. They are designed for dry in and dry out batch wafer processing of multiple lots of wafers from 100mm to 300mm. Custom configurations combine SECS/GEM interface capabiliti