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Philips Photonics Selects ClassOne Tool For Wafer Cleaning

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Solstice S4's processing flexibility, performance and small footprint highly suited to VCSEL manufacturing, says firm

Semiconductor equipment manufacturer ClassOne Technology has sold its Solstice S4 system to Philips Photonics, one of the industry's leading providers of VCSEL devices. The announcement was made by Byron Exarcos, ClassOne Group CEO, and Hans Peter Ehweiner, general manager at Philips Photonics. The new ClassOne equipment will be installed at the Philips facility in Ulm, Germany.

“We will be using the new Solstice S4 for wafer cleaning applications,” said Ehweiner. “So its unique processing flexibility and high performance are especially useful to us, as well as its small footprint. ClassOne's responsiveness and support for us in Germany are also significant factors in this purchase decision, thus we are looking forward to a fruitful and longstanding relationship."

"Solstice initially built its reputation on quality electroplating," said Exarcos. "But with its Plating-Plus capabilities, Solstice is now recognised as a powerful multiprocessing tool that can handle everything from plating to wafer cleaning, high-pressure metal lift-off, resist strip, UBM etch and more. Phillips Photonics is a perfect example of next-generation fabs that are using Solstice primarily for those additional wet processes. It's also notable that Solstice is becoming the tool of choice for VCSEL manufacturers around the world.”

The Solstice family of wet-processing tools includes the four-chamber Solstice S4 and the eight-chamber Solstice S8, for 75wph, automated wet-processing production, as well as the 2-chamber Solstice LT for semi-automated process development. The platform was specifically designed for ≤200mm wafers, which are used in compound semiconductor and many emerging technologies. With its special Plating-Plus multi-processing capability, Solstice is able to reduce the number of different tools that many users need to purchase. Solstice equipment is also known for being priced significantly lower than similarly configured systems from the large manufacturers. It has been described as providing “Advanced Wet Processing for the Rest of Us.”

With 20 years of history in VCSEL technology, Philips Photonics produces VCSEL-based solutions for data communications, consumer and industrial applications — for security, surveillance, night vision and a range of sensing applications. The company has enabled the introduction of laser-based PC mice, high bit-rate active optical cables, and has introduced VCSEL-based Laser Doppler Technology to consumer applications.



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