News Article

Horiba And Socrate Industrie Partner On Vacuum Coating


Companies to work together on closed-loop process and control technologies that ensure coating thickness uniformity and composition

Horiba, a UK-based manufacturer of instruments and measurement systems, is collaborating with Socrate Industrie, a French firm, on process and control technologies that stand to improve quality and yield in vacuum coating applications that use PVD and plasma-enhanced chemical vapour deposition (PECVD).

Socrate Industrie supplies vacuum coating equipment for PVD and microwave enhanced plasma and hot-filament chemical vapour deposition and devices such as heaters and cathodes, as well as engineering services, into a variety of industrial sectors, including aerospace and medical.

Jean-Paul Gaston, product manager of Horiba Scientific, comments: “We're working with Socrate Industrie on the development of a precision process control and analysis solution for metallic thin layer coating processes. The initial goal of the collaboration is to achieve optimum oxides coating stoichiometry and deposition rate, thickness and uniformity on 3D structures.”

Gaston goes on to explain that whilst the coating of flat surfaces, such as silicon wafers, still requires good control and monitoring to ensure coating quality in terms of uniformity and composition, deposition onto 3D objects is extremely challenging. He says: “Insufficient coating on the sides, for example, could reduce the end product's efficiency and reduce its life. In contrast, more coating than necessary in other areas, say the top surface, is wasteful of materials and process gases. Our first task is to create a close loop control system that includes a mass flow controller and an optical spectrometer, both of which are Horiba products, for the stoichiometry monitoring of the coating.”

During PVD and PECVD, the light emission of the plasma is indicative of the materials present and the reactions taking place in the chamber. The inclusion of real-time signals representative of the chemical reactions taking place into the control of the materials and process gases going into the chamber provides a much-needed level of automation, will reduce waste and remove the risk of having to re-coat.

Gaston concludes: “There is a growing need for in-line / in-situ material analysis and characterisation in vacuum coating applications, but the metrology equipment needed is typically found in the scientific laboratory and was not designed for inclusion in manufacturing scenarios. Horiba, as an OEM of not only a wide range of industrial process control products, like mass flow controllers and residual gas analysers, but also world-leading scientific analysis equipment, is therefore the ideal partner to help create bespoke, well-engineered solutions.”

AngelTech Live III: Join us on 12 April 2021!

AngelTech Live III will be broadcast on 12 April 2021, 10am BST, rebroadcast on 14 April (10am CTT) and 16 April (10am PST) and will feature online versions of the market-leading physical events: CS International and PIC International PLUS a brand new Silicon Semiconductor International Track!

Thanks to the great diversity of the semiconductor industry, we are always chasing new markets and developing a range of exciting technologies.

2021 is no different. Over the last few months interest in deep-UV LEDs has rocketed, due to its capability to disinfect and sanitise areas and combat Covid-19. We shall consider a roadmap for this device, along with technologies for boosting its output.

We shall also look at microLEDs, a display with many wonderful attributes, identifying processes for handling the mass transfer of tiny emitters that hold the key to commercialisation of this technology.

We shall also discuss electrification of transportation, underpinned by wide bandgap power electronics and supported by blue lasers that are ideal for processing copper.

Additional areas we will cover include the development of GaN ICs, to improve the reach of power electronics; the great strides that have been made with gallium oxide; and a look at new materials, such as cubic GaN and AlScN.

Having attracted 1500 delegates over the last 2 online summits, the 3rd event promises to be even bigger and better – with 3 interactive sessions over 1 day and will once again prove to be a key event across the semiconductor and photonic integrated circuits calendar.

So make sure you sign up today and discover the latest cutting edge developments across the compound semiconductor and integrated photonics value chain.



Search the news archive

To close this popup you can press escape or click the close icon.
Register - Step 1

You may choose to subscribe to the Compound Semiconductor Magazine, the Compound Semiconductor Newsletter, or both. You may also request additional information if required, before submitting your application.

Please subscribe me to:


You chose the industry type of "Other"

Please enter the industry that you work in:
Please enter the industry that you work in:
Live Event