AMEC Introduces MOCVD System for UV-LEDS
With a maximum reactor chamber temperature of 1400degC, the tool ie designed for the growth of high-quality aluminium nitride and high-aluminium component material
Advanced Micro-Fabrication Equipment Inc. China (AMEC), has launched the Prismo HiT3 system – an MOCVD tool engineered to mass produce deep ultra-violet light emitting diodes (DUV LEDs).
The system is the newest addition to AMEC's portfolio of Prismo MOCVD products. With a maximum reactor chamber temperature of 1400degC, the tool enables the growth of high-quality aluminium nitride and high-aluminium component material. Built for high throughput, the system can process up to 18 2-inch epitaxial wafers per run, with extendibility to 4-inch wafers.
Early customers include China-based Jason Semiconductor Co., Ltd. (Jason) a producer of DUV LEDs for home applications, medical instruments, and products used for scientific research.
DUV light has been used for decades as a disinfectant for industrial and consumer applications. It works by disrupting the DNA of bacteria and viruses, and killing their reproductive capabilities. The emergence of pathogens like SARS, MERS, and COVID-19 has increased demand for DUV LED products with the wavelength power to destroy new microorganisms. Today's state-of-the-art for this purpose is DUV LEDs at wavelengths of 260-280nm like the products manufactured by Jason.
"Today, we're seeing the benefits of DUV LEDs in real time with the technology now an important tool used to destroy harmful pathogens," said Jian Kang, chairman at Jason. "As the science of DUV LED technology continues to advance, we are proud to operate at the leading edge with products to disinfect public environments, as well as the home. AMEC's Prismo HiT3 system can meet the high-volume/low cost-of-ownership manufacturing imperatives for DUV LEDs. The company is a trusted partner with its high-performance MOCVD equipment solutions and world-class process expertise."
"The Prismo HiT3 system contains all the innovative features of our proven Prismo platform, now with new ultra-high-temperature process capabilities for AlN-based DUV LED applications," said Zhiyou Du, executive VP and COO at AMEC. "We're pleased that Jason is an early user. The company is known for stretching the limits of LED technology and creating products that benefit human health. We're glad that our equipment solutions are helping them meet their technology and cost goals for next-generation DUV LEDs."