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Siltronic Ramps GaN Wafer Activities With Aixtron System

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Additional epitaxy reactor will produce 150 and 200 mm GaN-on-Si epi wafers for RF and power applications

Siltronic AG has strengthened its GaN on silicon wafer activities with an AIX G5+ C deposition system from Aixtron SE. Siltronic will use the additional epitaxy reactor for the production of 150 and 200 mm GaN-on-Si epi wafer for RF and power applications.

The AIX G5+ C system is fully automated and equipped with in-situ cleaning and a cassette-to-cassette transfer module for epitaxial stability and low defect ratios.

The Planetary Reactor includes Aixtron's Auto-Feed Forward (AFF) individual on-wafer temperature control and has an 8x150-mm and 5x200-mm configuration. The system will be shipped to the customer in the fourth quarter of this year.

RF, power devices and circuit are enabling high switching frequencies and efficient energy management with high power densities. These features are required for rapidly growing applications such as data centers, renewable energy and the next generation of wireless networks (5G). Alongside the smaller form factor, GaN-on-Si is an ideal candidate for rapid charging and car electrification.

Christoph von Plotho, CEO of Siltronic AG, says: “The GaN-on-Si market is an important future growth field. We have been very active early on within the GaN Power Program of imec, the research institute for nanoelectronics, to provide our customers with leading edge performance. To position ourselves competitively in this market, we need a reactor which allows us to deliver our customers with the best performance epi-wafers while ramping up volume at lowest costs. We see the AIX G5+ C as the ideal solution in this regard both for GaN Power and RF devices to serve the growing applications and megatrends. The use of GaN-on-Si technology also makes a central contribution to improving the energy balance through decarbonisation”.

“The GaN-on-Si technology has made impressive breakthrough in the last years and devices are rapidly gaining acceptance into both consumer and industrial products for power and RF application. The AIX G5+ C is a fully mature platform dedicated to these advanced applications, and it's fantastic that we can accompany our customers to unlock these new markets”, says Felix Grawert, President of Aixtron.

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