Picosun increases efficiency for LED and OLED production
P-300BV ALD system offers almost 100 percent better throughput
Picosun Group has proved to significantly increase the production efficiency of its LED and OLED customers with the Picosun P-300BV ALD system.
Recent tests show that a reduced ALD process cycle time and an increased number of wafers deposited with the same film thickness resulted in almost 100 percent better throughput.
A throughput of over 20 000 wafers per month can be reached with a wafer batch of 100 wafers. This figure is based on 4inch 100 wafers, >20000 WPM, <1 percent 1sigma WiW, <1 percent 1sigma WtW, <1 percen 1sigma BtB (120 nm TMA + H2O @ 200degC).
At the same time, the process quality in terms of film thickness uniformity has remained on an excellent level (<1 percent 1sigma) when measured within wafer, wafer to wafer as well as batch to batch, accoriding to the company.
“Picosun ALD solutions have become the standard in high volume ALD manufacturing. PICOSUN P-300BV ALD system is designed especially for production of LEDs and OLEDs. With our experience and deep know-how in ALD we are continuously striving to minimise the total cost of ownership and ensure future-proofness for our customers”, states Juhana Kostamo, VP, Industrial Business Area of Picosun Group.