Riber announces French University order
University of Montpellier’s NanoMIR group has ordered a fully automatic multi-chamber Compact 21 DZ research MBE system
Riber, a maker of MBE equipment, is announcing an order for an automatic MBE research system from a French customer.
The University of Montpellier’s NanoMIR group, a world leader in antimonide based compound semiconductor materials, has ordered a fully automatic multi-chamber Compact 21 DZ research MBE system. The equipment has been funded by the Investments for the Future program (PIA) managed by the French National Research Agency (ANR) (Project “HYBAT”, ANR-21-ESRE-0026).
The system comprises two chambers configured for the MBE growth of antimonide containing compounds (III-Sb), and a third one for Remote Plasma assisted Chemical Vapour Deposition (RP-CVD) of SiGe. To optimise process control, the system will be equipped with Riber’s new EZ-CURVE instrument, a metrology tool enabling real-time in-situ precision control and characterisation of the MBE growth process. This multi-chamber system will be applied to the development of novel III-V infrared photonics materials deposited on silicon wafers and novel quantum structures, areas of strategic interest throughout Europe.
Eric Tournié , MBE group leader at the University of Montpellier, explained: “The new Compact 21 DZ cluster will extend & reinforce our existing Riber MBE 412 and Compact 21 cluster capability to increase the range of possibilities we can explore in our R&D on Mid-to-Long wavelength IR and quantum devices. Our existing Riber MBE installations have been exceptionally stable and reproducible over the short and long term; this is a pre-requisite to grow the complex III-Sb structures needed for our work. We are already familiar with the new EZ-CURVE tool which we know is going to extend our reach in precision & perfection as we set out to grow ever more demanding device materials.”
Philippe Ley, Riber’s chairman of the executive board, commented: “This new order consolidates Riber’s already unequivocal position as the global market leader in the supply of MBE equipment for optoelectronic materials containing antimonide.”
Riber’s Compact 21 R&D product range is said to be the market’s most versatile and complete with reference standard throughout III-V, II-VI, nitride and oxide materials.
