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EVG and ITRI expand heterogeneous integration partnership


EVG's advanced wafer bonding and lithography systems now installed at ITRI’s state-of-the-art facility

EV Group (EVG), a supplier of wafer bonding and lithography equipment, has announced that it has expanded its collaboration with the Industrial Technology Research Institute (ITRI) in Hsinchu, Taiwan, on developing advanced heterogeneous integration processes.

With the support of the Department of Industrial Technology (DoIT) of the Ministry of Economic Affairs (MOEA), Taiwan, ITRI established the Heterogeneous Integration Chip-let System Package Alliance (Hi-CHIP) to help create an ecosystem covering package design, testing and verification, and pilot production, to achieve the goal of supply chain localisation and expand business opportunities.

As a member of the Hi-CHIP Alliance, EVG has provided several of its advanced wafer bonding and lithography systems, including the LITHOSCALE maskless exposure lithography system (pictured above), EVG850 DB automated debonding system, and GEMINIFB hybrid bonding system. The installation of these high-volume-manufacturing platforms at ITRI’s state-of-the-art facility will help enable EVG’s and ITRI’s shared customers to accelerate the development and transfer of new heterogeneous integration processes from R&D to customers’ fabs.

Robert (Wei-Chung) Lo, deputy general director of Electronic and Optoelectronic System Research Laboratories at ITRI said: "Having the same fully automated high-volume-manufacturing systems in our research facility that our customers have in their fabs, including these new wafer bonding and lithography solutions from EV Group, enables our customers to immediately transfer process recipes developed at ITRI to their own fabs – providing short ramp-up time from lab to fab.”

“Key to our Triple-i philosophy of invent-innovate-implement is our focus on engaging with world-leading research institutes, like ITRI, to accelerate the development and commercialisation of new technologies that drive future innovations in the semiconductor industry,” stated Hermann Waltl, executive sales and customer support director and member of the executive board at EV Group.

“Our ongoing collaboration with ITRI gives us access to world-class research expertise and further enhances our process support infrastructure in Taiwan, which EVG has significantly expanded over the years to better meet the growing needs and challenges that our customers and partners in the region face. This includes our exceptional process and application engineering team based in multiple locations across Taiwan, which complements the services provided at EVG’s Heterogeneous Integration Competence Centre at our headquarters in Austria.”

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