Oxford Instruments to supply KAUST
Company to supply hardware upgrades and ALE for complete ALE and ALD atomic scale processing capability
Oxford Instruments Plasma Technology has announced a significant agreement with the Saudi Arabia-based King Abdullah University of Science and Technology (KAUST) Core Labs.
Under the agreement, KAUST will benefit from the addition of two Oxford Instruments PlasmaPro100 Cobra atomic layer etch (ALE) systems to add to its existing Oxford Instruments FlexAL atomic layer deposition (ALD) capability.
With both ALE and ALD modules, KAUST says it is better positioned to develop its research and bridge the gap between academia and industry on projects like GaN HEMT Origin of Interfacial Charges and GaN HEMT Highly Suppressed Interface Traps.
The agreement includes upgrades to deposition and etch equipment, including FlexAL, IonFab and inductively coupled plasma (ICP) etch systems, already installed at KAUST’s research laboratories. The upgrade programme includes the installation and ongoing support of X20 programmable logic controllers (PLCs). In addition, the modules will be updated with Oxford Instruments’ latest software control application PTIQ for data logging and analysis for process diagnostics and preventative maintenance tracking.
Ken Kennedy, laboratory director at KAUST Nanofabrication Core Lab, said: “The agreement continues KAUST’s development of its state-of-the-art facilities and technical expertise that attracts the world’s best researchers and brightest students.” He added, “this investment emphasises KAUST’s collaboration between its faculty and shared facilities, supporting the Kingdom in advanced scientific and technological education and research.”
Quality and digital director Dean Furlong of Oxford Instruments said: “This agreement is a great example of our ability to develop long-term strategic partnerships with key customers in the global research and development market, and support them with our extensive upgrade portfolio and service solutions,” commenting further that “this is a substantial investment from KAUST that will enhance its reputation as an internationally recognised user facility, and further support its cutting-edge ALD research with the addition of ALE capability.”
