CVD Equipment releases SiC PVT system
New system is engineered for growing 150 mm diameter SiC boules/ingots
CVD Equipment Corporation has introduced the PVT150, a physical vapour transport (PVT) system for SiC crystal boule growth. The PVT150 model is said to be a compact platform design, exclusively engineered for growing 150 mm diameter boules/ingots and is upgradable to 200 mm (PVT200). The company plans to launch its PVT200 in Q3 2023.
The PVT150 /PVT200 are production systems with RF induction heating, process controls that stabilise temperature +/- 0.5°C at 2500°C and pressure at +/- 1 percent of set point. Automatic process chamber load and unload, recipe start, crucible stage rotation and motorised pyrometer alignment by remote-control box for real-time monitoring of the crucible during crystal growth are some of the many system features that drive efficiencies, according to the company. Automated positionable coil with axial vertical travel allows for thermal gradient control to optimise SiC boule growth.
“Our PVT product series provides unmatched precision and reliable control of all process parameters. This allows for high yield run to run repeatability as well as system to system matching. CVD Equipment’s product portfolio includes turnkey configured systems as well as customized solutions to fit varying crucible designs. Our expanded internal vertical production capacity enables lead times as short as 6 months ARO,” said Emmanuel Lakios, president and CEO of CVD Equipment Corporation.
CVD Equipment Corporation has recently expanded its US manufacturing facility (128,000 ft2) located in Central Islip, NY, ramping up production capacity for high-quality, high-performance PVT systems.
