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Oxford Plasma Tech Tool Used For Novel Opto Detector

Researchers at AMO have used Oxford Instruments Plasma Technology's fabrication solutions to develop a graphene based photonics device capable of operating at 25 Gb/s per channel

Researchers at AMO GmbH, a non-profit SME based in Aachen, have used Oxford Instruments Plasma Technology's fabrication solutions to develop a graphene based photonics detector device capable of operating at a data rate of 25 Gb/s per channel. The device converts optical modulation data into an electrical signal.

Oxford Instruments offers solutions for the data communications market for both scaled-up production as well as novel device R&D. The detector fabrication solution includes: waveguide fabrication, III-V/2D materials mesa etching and graphene/2D/novel materials deposition. In addition Oxford Instruments also offers a range of solutions for devices such as the InP edge emitting lasers and VCSELs for photonic data communications.

Devices developed by scientists at AMO within the European Graphene Flagship project have set the yardstick in terms of high speed photodetectors operating at telecom wavelengths. At the Mobile World Congress in Barcelona this year, AMO scientists along with collaborators with the Graphene Flagship project demonstrated the world's first graphene data communication link operating at 25 Gbits/s per channel. As such the detector developed at AMO can reach speeds of up to 130 GHz

"We are extremely delighted to see the progress made by researchers at AMO on our device fabrication solutions", says Frazer Anderson, innovation and solutions director, Oxford Instruments Plasma Technology. He continued:" We continue to invest in further developing and improving our cutting edge device fabrication processes for datacomms and photonics through feedback from such impressive success stories."

Max Lemme, managing director, AMO GmbH comments: "The latest results on high-speed graphene-based data communication are very encouraging. They are a positive testament to AMO's mission: to identify new materials and to demonstrate new technologies for future applications in electronics and optoelectronics, such as IOT and 5G. We can only achieve such results through our state-of-the-art R&D process line, which includes a large number of tools for scalable nanotechnologies, such as Oxford Instruments' RIE, ALD and CVD tools"

The devices were developed at AMO's 6inch device fabrication pilot line equipped with Oxford Instruments fabrication solutions which includes ICP RIE, ALD and PECVD tools.

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