CS Innovation Award
Veeco has a strong track record of developing award-winning products rooted in pioneering technology. Veeco’s GENxcel™ R&D molecular beam epitaxy (MBE) deposition system is the latest demonstration of the company’s deep understanding of industry challenges and how to address them through innovative engineering. The GENxcel is designed specifically for compound semiconductor R&D and pilot production markets and produces high quality epitaxial layers on substrates up to 100mm in diameter for a wide variety of applications and materials including GaAs, InP, nitrides and oxides.
With its inventive architectural concept, the GENxcel system achieves a number of industry firsts. As the first MBE system designed specifically for integrating multiple epitaxial techniques, it has the ability to transfer wafers in-situ from the MBE system to other processes such as Veeco-CNT atomic layer deposition (ALD), providing the opportunity for novel compound semiconductor research. Additionally, it is the first MBE system designed with EtherCAT protocol—improving ease-of-use and reliability while also allowing easier serviceability. All of these features have been incorporated in the system’s efficient single frame design that combines all vacuum hardware and on-board electronics to make it up to 40 percent smaller than other 100mm wafer MBE systems, saving valuable laboratory space.
The GENxcel exemplifies Veeco’s expertise of designing high performance MBE systems through a system capable of high-quality epitaxial growth on single 100mm substrates. The GENxcel features 12 symmetrical, large capacity effusion cell ports for unmatched process flexibility.
The innovative architectural concept of combining the MBE hardware with the electronics and controls in order to reduce footprint while improving accessibility and serviceability is unique within the MBE industry, making Veeco the only company to develop a 100mm MBE system that is fully integrated into a single platform. Similar MBE systems have the MBE hardware, electronics cabinet and software control computer as three separate components. This design element saves users tens of thousands of dollars in cleanroom laboratory expenses.
First introduced in August 2017, the GENxcel system is invaluable to customers as the compact design saves precious laboratory real estate and saves room for multiple systems. GENxcel’s lower upfront capital cost, coupled with reduced ongoing operational costs through reduced liquid nitrogen consumption, improved material utilization and improved overall system reliability sets an entirely new benchmark for industry standards and expectations.