Hiden Analytical launches EP-Replayer
Hiden Analytical has announced the launch of the EP-Replayer, a new software solution designed to streamline End Point recipe development and process optimisation for users of Hiden’s IMP-EPD ion mass spectrometer system.
The EP-Replayer enables users to replay previous etch data in real-time, providing a precise, wafer-efficient way to simulate, test, and refine End Point detection strategies.
By defining variables in the algorithmic recipe template, users can visualise and optimise their End Point detection methods without consuming additional wafers—supporting a more cost-effective and reliable etch process, according to the company.
“With the EP-Replayer, we’re giving users a smarter way to build and test End Point detection recipes,” said Matt Wilding, senior applications specialist at Hiden Analytical. “It’s all about reducing waste, improving repeatability, and accelerating development cycles without interrupting the live process.”
Pictured above: EP-Replayer scan: Replay mode used to test and optimise a third layer End Point
