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Horiba Announces New Ellipsometer

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Uvisel Plus includes the next generation of FastAcq technology with increased measurement accuracy

Horiba Scientific, a French maker of spectroscopic ellipsometry equipment, has launched the UVISEL Plus, a modular ellipsometer which includes the newest acquisition technology designed to measure thin film samples faster and more accurately.

FastAcq acquisition technology enables a sample measurement from 190 to 2100nm to be completed within 3 minutes, at high resolution. The possibility to continuously adjust the spectral resolution along the measurement range enables to scan a sample smarter and faster.The UVISEL Plus also introduces a new calibration procedure, delivering faster performance and accuracy.

Horiba’s UVISEL Series phase modulation technology is widely used for delivering polarization modulation for accurate ellipsometric parameter measurements. The polarisation modulation capabilities of the photoelastic modulator deliver high sensitivity for measurement of critical thin transparent layers deposited onto glass substrates.

Designed for enhanced flexibility for thin film measurements, the UVISEL Plus offers microspots for patterned samples down to 50µm, variable angle from 40 to 90°, an automatic horizontal mapping stage and a variety of accessories, making it scalable.The spectral range from 190 to 2100 nm is covered by two UVISEL Plus configurations: 190-920 nm and a NIR extension up to 2100 nm.


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