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Angstrom and k-Space Partner on Temperature Monitoring


Quantum computing qubit fabrication platform uses kSA BandiT non-contact technology for monitoring wafer temperature

In situ metrology manufacturer k-Space Associates has installed a kSA BandiT non-contact optical temperature monitoring system on an Angstrom Engineering Quantum Series Josephson junction fabrication platform designed for a large commercial partner.

Angstrom’s Quantum Series equipment fabricates qubits for use in quantum computing. The Quantum Series Josephson junction fabrication platform uses physical vapour deposition, ion processing, gas flow management, precise substrate fixing, and a pure vacuum environment to tune every variable of Josephson junction fabrication to the users’ requirements. 

The kSA BandiT system is used in the oxidation chamber to monitor the substrate temperature in the room temperature to 250degC. k-Space'a patented band-edge-based technology enables the non-contact measurement of temperatures.

The kSA BandiT system was engineered to accommodate the fabrication system’s specific geometry and process materials. The oxide layer grown in this chamber is critical to the performance of the device and is largely influenced by the growth temperature. The ability to accurately measure the temperature of the wafer during oxidation creates a powerful level of control and should lead to a deeper understanding of this relationship, according to the company.

Barry Wissman, a k-Space product development engineer and one of the kSA BandiT technology inventors said: “I am very impressed with Angstrom Engineering’s technology, and have enjoyed working with them on this project. Our BandiT instrument is able to accurately measure their substrate temperature in real time, even at low temperatures and in the presence of radiation from a substrate heating system. At k-Space we pride ourselves in the ability to customise our systems to provide the measurement and control capabilities our customers need to stay on top of their markets.”

“It has been a pleasure working alongside k-Space to bring this exciting low-temperature measurement technology to the quantum circuit fabrication community. The BandiT equips our Quantum Series of equipment with a powerful tool for direct, non-contact measurement of wafer temperatures during critical processes. We believe that this will provide researchers with a critical piece of information that can be used to optimise the quality and yield of quantum devices. Partnering with k-Space has allowed us access to world-leading technology and the knowledge and support of their helpful and talented staff – we are very happy to be working together,” stated Mike Miller, director of business development at Angstrom Engineering

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