Axcelis SiC ion implanters see success in Japan
Company announces shipment of Purion EXE SiC and successful evaluation of Purion H200 SiC
Axcelis Technologies, a US maker of ion implantation equipment, has announced the shipment of its Purion EXE SiC high energy implanter as well as a successful Purion H200 SiC medium energy implanter evaluation closure at a power device chipmaker in Japan.
The systems will be used for 150mm and 200mm production of SiC power devices supporting automotive, industrial, energy, and other power intensive applications.
Greg Redinbo, EVP, Marketing and Applications said: "The successful evaluation closure of the 200mm Purion H200 SiC system enables it to join an existing 200mm Purion EXE SiC in production at a leading power device customer in Japan.
"The shipment of an additional Purion EXE SiC to a new 150mm customer in Japan highlights growing customer requirements for even higher energy ion implant recipes on advanced SiC power devices, which the Purion Power Series provides."
