Samco ALE system ordered by University of Adelaide
Samco has sold its advanced etching system, the RIE-400iP-ALE, to the University of Adelaide, marking the first introduction of Atomic Layer Etching (ALE) technology in Australia.
The system, supplied in partnership with Samco’s Australian distributor Ezzi Vision, is scheduled to ship from Samco’s Kyoto factory in December 2025 and will be installed in the University’s new $5 million Quantum Materials and Device Fabrication Lab, building on the University’s historic strengths in physics, engineering and material science.
This acquisition was supported through the Australian Research Council’s Linkage Infrastructure, Equipment and Facilities (LIEF) scheme, which awarded around $660k to establish the National Atomic Layer Etching Facility at the University of Adelaide.
This project marks the first introduction of Atomic Layer Etching (ALE) technology in Australia
The RIE-400iP-ALE system will enable inductively coupled plasma reactive ion etching (ICP-RIE) and atomic layer etching of III-V semiconductor materials including GaN, GaAs, and InP.
With precise layer-by-layer removal, etch depth control and uniformity, and low surface damage, the system is suited for fabrication of next-generation nanoscale electronic and photonic devices.
“The establishment of Australia’s first Atomic Layer Etching facility represents a major step forward for our research community,” commented Andy Boes of the Institute for Photonics and Advanced Sensing (IPAS), University of Adelaide.
“With Samco’s RIE-400iP-ALE system, we will be able to precisely process III-V semiconductor materials at the atomic scale, enabling advances in quantum technologies, photonics, and nanoscale electronics. This capability will accelerate collaborations across disciplines and strengthen Australia’s global position in semiconductor and photonics research.”
Tsukasa Kawabe, president and COO of Samco Inc., added, “We are proud to support the University of Adelaide in launching Australia’s first Atomic Layer Etching facility. This project highlights the importance of ALE technology for next-generation device fabrication, particularly in III-V materials.”
This sale represents Samco’s second overseas delivery of an ALE system.
