Showa Denko Increases MOVPE Wafer Production Capacity With Further AIX 2600G3 MOCVD System
Source: Aixtron AG
July 12th, 2001
Aachen, Germany. Showa Denko, one of the leading manufacturers of IT related devices, purchased another automated AIX 2600G3 Planetary Reactor® System. Showa Denko qualified the AIX 2600G3 for their 4" technology and demonstrated unrivalled thickness uniformity, composition and doping of the epiwafer together with utilization efficiency resulting in low cost. With a wafer configuration of 8x4" or 5x6", Showa Denko will fabricate structures for the wireless communication market.
MOCVD technical staff of Showa Denko stated: "Due to its highest throughput and supreme sqin/hour ratio we have again decided for the AIX 2600G3 Planetary Reactor® for IT related devices. With its wide process window, high uniformity and precursor utilization, the Planetary Reactor® is the best mass production tool to grow high quality layers at low cost. We are looking forward to ordering further reactors to satisfy the demands of the market."
AIXTRON offers a wide range of epitaxial systems for MOVPE, VPE and LPE from R&D-oriented systems up to large-scale Planetary Reactor® production systems for up to 25x4" or 7x6" wafers. The company has sold over 500 systems worldwide, provides an extensive service and support network for maintenance and upgrading and is represented in over 15 countries.
AIXTRON is the leading supplier of MOCVD equipment to industrial clients such as Agere (formerly Lucent) Agilent/LumiLeds, Alcatel, Anritsu, AXT, Epistar, Epitronics, EPSON, Furukawa, Honeywell, IQE, ITT, JDS-Uniphase, Kopin, Motorola, Nortel, Osram, Procomp, Samsung, Siemens, Showa Denko, Sumitomo Electric, Thales, UEC, VPEC, Yokogawa and numerous Japanese corporations are further references. AIXTRON systems have also been installed in the most renowned research institutes worldwide including JPL, Sandia Nat. Lab., Fraunhofer Institute, ITRI-OES, CNRS. AIXTRON is very active in advancing MOCVD technology through collaborations and joint R&D projects with major partners worldwide.
Contact: Deirdre Berg AIXTRON AG Tel: +49 (241) 8909-473 Fax: +49 (241) 8909-149 brg@aixtron.com
Deirdre Berg
AIXTRON AG
Tel: +49 (241) 8909-473
Fax: +49 (241) 8909-149
brg@aixtron.com
E-mail: brg@aixtron.com
