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News Article

Tegal Receives Order for Its Recently Introduced i900 Series Etch System From a Major European LED Manufacturer

SOURCE: Tegal Corporation

PETALUMA, Calif. Tegal Corporation today announced the sale of an i901 plasma etch system to a leading European manufacturer of light emitting diodes (LEDs) and opto-electronic components. The i901 system will be used for etching on gallium arsenide (GaAs) and silicon wafers at the customer s facility in Germany for the production of LEDs for automotive, industrial and communications applications, and infrared detectors.

"The Tegal i901 etch system is the latest generation of our production-proven 900 series etchers. The i901 provides consistent results for etching compound semiconductors like GaAs at a very low cost of ownership, said Jim McKibben, vice president of worldwide marketing and sales for Tegal. "This new customer selected Tegal s system to leverage our new integrated data collection and analysis tools to enhance their current process yields and for future process development.

McKibben said Tegal s 900 series systems are widely recognized for their low cost of ownership and high throughput. More than 1,300 of the 900 Series systems have been installed around the globe and are supported by an extensive worldwide parts and service organization. Adept at handling fragile compound semiconductor substrates, the 900 Series delivers highly reliable, repeatable results in etching telecommunications and opto-electronic devices. Tegal is a leading equipment supplier to these market segments, which market research firm Strategies Unlimited projects will grow at a CAGR in excess of 14 percent over the next five years.

About Tegal Corporation

Tegal Corporation, headquartered in Petaluma, Calif., is a leading designer and manufacturer of plasma etch systems used in the production of opto-telecom devices, integrated circuits (ICs), and other related microelectronics devices. Etching is a key process and must be repeated multiple times in the production of these devices. Tegal markets and services its systems in all major IC-producing regions of the world. Tegal was recently granted its fifth VLSI Research, Inc. Ten BEST award in recognition of its superior customer support and service. More information is available on the Internet at www.tegal.com.

Safe Harbor Statement

Except for historical information, the statements made in this news release that refer to expectations, market acceptance, projections or other characterizations of Tegal or its products are forward-looking statements. Such forward-looking statements are subject to certain risks and uncertainties including, but not limited to industry conditions, economic conditions, acceptance of new technologies, as well as other risks set forth in the Company s periodic filings with the Securities and Exchange Commission.

Contact:

Tegal Corporation, Petaluma
 Jim McKibben, 707/763-5600
(VP Worldwide Sales and Marketing)
jmckibben@tegal.com

or
Loomis Group, Inc.
Megan Goodson, 415/882-9494
goodsonm@loomisgroup.com

Tegal Corporation, Petaluma
 Jim McKibben, 707/763-5600
(VP Worldwide Sales and Marketing)
jmckibben@tegal.com
or
Loomis Group, Inc.
Megan Goodson, 415/882-9494
goodsonm@loomisgroup.com
E-mail: goodsonm@loomisgroup.com
Web site: http://www.tegal.com

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